An acoustic waveguide based on doubly-bonded silicon/PPT/silicon structures

E. Courjon (1) , F. Bassignot (1) , G. Ulliac (1) , Thierry Laroche (2) , J. Garcia (3) , D. Gachon (4) , S. Queste (1) , J.-P. Romand (4) , S. Ballandras (1) , R. Petit

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)
2 LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique
3 LFP - URA 2453 - Laboratoire Francis PERRIN
4 ENSMM - Ecole Nationale Supérieure de Mécanique et des Microtechniques

In this paper, we present new results on the development of piezoelectric transducers based on periodically poled ferroelectric domains in a lithium niobate plate bonded between two silicon wafers. The fabrication of the periodically poled transducers operating in the range 50-500 MHz has been achieved on a 3 inches 500 mum thick wafer. These devices then have been bonded on silicon wafers to fabricate a waveguide. Guided elliptic as well as partially guided longitudinal modes are excited. The experimental responses of the tested devices are compared to predicted harmonic admittances, showing a good agreement between both results and allowing for a reliable analysis of the nature of the excited modes. We also show interesting studies of material combinations used to guide ultrasonic waves. Dispersion properties have also been studied for a structure Si/PPT/Si.

Domains: Optics / Photonic

E. Courjon, F. Bassignot, G. Ulliac, Thierry Laroche, J. Garcia, et al.. An acoustic waveguide based on doubly-bonded silicon/PPT/silicon structures. 22nd IEEE International European Frequency and Time forum, Apr 2009, Besançon, France. pp.898-903, ⟨10.1109/FREQ.2009.5168317⟩. ⟨hal-00485716⟩